1. What is NBTI?
2. Back to major reliability concern
3. Dual poly-process
4. Reaction-diffusion Model
What is NBTI?
▶ Negative Bias Temperature Instability (NBTI)
▷ Instability of PMOS transistor parameters under negative bias and high temperature
→ Threshold voltage, trans-conductance, saturation current, etc.
▷ Persistent reliability concern for CMOS technology below 130 nm nodes
Typical degradation characteristics of NBTI
Id-Vg and gm-Vg curves for fresh device (full line) and after 10,000 s of stress (dashed line) for a p-MOSFET device with a 2 nm-thick oxide at 125 °C in the linear regime