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Spectral Reflectometer

저작시기 2009.03 |등록일 2011.02.13 파워포인트파일MS 파워포인트 (pptx) | 18페이지 | 가격 5,000원

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본자료는 Spectral Reflectometer에 관한 대학원 수업자료입니다.

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본문내용

Spectral Reflectometer
Application of Reflrectometer
Measurement System based on Optical Technology
Semiconductor / FPD
Basic Application Market
Nano / IT Materials
Biotechnology
Education / Scientific Instrument
Semiconductor
- PR, Poly-Si, Oxide
FPD
Cell Gap, a-Si, ITO, Oxide
Application of Various fields is possible!!
Comparison with other methods
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Microscopy
- Optical microscope, SEM, TEM
- Cross sectional image of sample with high magnification
Destructive, special sample preparation, micro structure
Any kinds of films, multi structure
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