Vibrational Properties of Amorphous CNx:H Films
by Fourier Transform Infrared Spectroscopy
Se Geun Ha, Ji Gong Lee and Sung Pil Lee*
Department of Electronic and Electrical Engineering, Kyungnam University
449 Wolyong-dong, Masan 631-701, Korea
제가 작성한 논문입니다.
3.PTIR spectra of a-CNx : H films
Hydrogenated amorphous carbon nitride (a-CNx:H) films were prepared by reactive RF magnetron sputtering system with DC bias at various deposition conditions. In hydrogenated CN samples, CHx and NHx groups give rise to stretching vibrations at 3000 and 3400 cm-1, respectively, according to increase of nitrogen incorporation. The broad band at 1500 cm-1 of IR observation is coincident to the amorphous carbon G and D bands of Raman spectroscopy. CN뻮p1 bond is observed around 2200 cm-1 as a weak peak. The intensities of these absorption peaks were depended on N2/Ar gas ratio.
 S.P. Lee, J.B. Kang and S. Chowdhury, J. Korean Phys. Soc. 39, pp. S1-S6, 2001.
 S. Nitta, M. Aono, T. Katsuno and Y. Naruse, Diamond Relat. Mater. Vol. 12, pp. 219-226, 2003.
 Pei Zou, Matthias Scherge, David N. Lambeth, IEEE Trans. on Magn., Vol. 31, No. 6, pp. 2985-2987, 1995.
 A.K.M.S. Chowdhury, D.C. Carmeron and M.S.J. Hashmi, Surface and Coatings Technology, Vol. 116-119, pp. 46-53, 1999.
 J.H. Kaufman, S. Metin and D.D. Saperstein, Physical Review B, Vol 39, pp. 13053-13060, 1989.
 J.G. Lee, S.G. Ha and S.P. Lee, Proceeding of the KIEEME Annual Summer Conference 2003, Vol. 4, pp. 164-167, 2003.
 S.G. Ha, J.G. Lee and S.P. Lee, Proceeding of the KIEEME Annual Summer Conference 2003, Vol. 4, pp. 872-875, 2003.
 B. Mitu et al., Applied Surface Science, Volume 184, pp. 96-100, 2001.
 M. Friedrich, Th. Welzel, R. Rochotzki, H. Kupfer and D. R. T. Zahn, Diamond Relat. Mater. Vol. 6, pp. 33-40, 1997.
 S.E. Rodil, A.C. Ferrari, J. Robertson and S. Muhl, Thin Solid Films, Vol. 420-421, pp. 122-131, 2002.
 S.P. Lee and J.B. Kang, Microchemical Journal, Vol. 70, pp. 239-246, 2001.