목차

I. INTRODUCTION
A. The Background Research
B. The Purpose and Method of Research
C. Control Method and Tendency of Recent Research of Ultra Precision Positioning Apparatus
1. Dividing Positioning Method of Coarse Apparatus and Fine Apparatus
2. Dual Positioning Method of Coarse Apparatus and Fine Apparatus

II. The Background of Theory
A. Specificity of AC Servo Motor
1. Occurrence Theory of Torque
2. Principle of DC Servo Motor
3. The Principle of AC Servo Motor
4. The Principle of the AC Servo Motor(Brushless Servo Motor)
5. Driving System
B. Specificity of Piezo Actuator
1. Piezo Actuator
2. Kinds of Piezoelectric Element
3. Specificity of Piezoelectric Element
C. The Principle of Measurement of Laser Interferometer

III. Modelling of Ultra Precision Positioning Apparatus
A. Model of Ultra Precision Positioning Apparatus
1. Model of Coarse Apparatus
2. Model of Fine Apparatus

본문내용

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them.
This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 ㎚ in precision working and accuracy with 1 ㎚ in ultra precision working are reached at the beginning of 2000s. Also, high speed and low vibration are really needed for the same reason.

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